Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7993485 | Methods and apparatus for processing a substrate | Erik C. Wasinger, Gary C. Ettinger, Sen-Hou Ko, Wei-Yung Hsu, Liang-Yuh Chen +1 more | 2011-08-09 |
| 7988535 | Platen exhaust for chemical mechanical polishing system | Hung Chih Chen, Allen L. D'Ambra | 2011-08-02 |
| 7963826 | Apparatus and methods for conditioning a polishing pad | Roy C. Nangoy, Shou-Sung Chang, Hung Chih Chen, Gerald Alonzo | 2011-06-21 |