Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8066552 | Multi-layer polishing pad for low-pressure polishing | Alain Duboust, Wei Lu, Siew Neo, Yan Wang, Antoine P. Manens +1 more | 2011-11-29 |
| 7963826 | Apparatus and methods for conditioning a polishing pad | Roy C. Nangoy, Donald Olgado, Hung Chih Chen, Gerald Alonzo | 2011-06-21 |