Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8066552 | Multi-layer polishing pad for low-pressure polishing | Shou-Sung Chang, Wei Lu, Siew Neo, Yan Wang, Antoine P. Manens +1 more | 2011-11-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8066552 | Multi-layer polishing pad for low-pressure polishing | Shou-Sung Chang, Wei Lu, Siew Neo, Yan Wang, Antoine P. Manens +1 more | 2011-11-29 |