Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8066552 | Multi-layer polishing pad for low-pressure polishing | Alain Duboust, Shou-Sung Chang, Wei Lu, Siew Neo, Yan Wang +1 more | 2011-11-29 |
| 8043870 | CMP pad thickness and profile monitoring system | Wei-Yung Hsu, Hichem M'Saad | 2011-10-25 |