Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084105 | Method of depositing boron nitride and boron nitride-derived materials | Jeong-Uk Huh, Mihaela Balseanu, Li-Qun Xia, Victor Nguyen, Derek R. Witty | 2011-12-27 |
| 8043870 | CMP pad thickness and profile monitoring system | Antoine P. Manens, Wei-Yung Hsu | 2011-10-25 |
| 7964442 | Methods to obtain low k dielectric barrier with superior etch resistivity | Huiwen Xu, Yijun Liu, Li-Qun Xia, Derek R. Witty | 2011-06-21 |
| 7951730 | Decreasing the etch rate of silicon nitride by carbon addition | Ritwik Bhatia, Li-Qun Xia, Chad Peterson | 2011-05-31 |
| 7923386 | Method to improve the step coverage and pattern loading for dielectric films | Mihaela Balseanu, Mei-Yee Shek, Li-Qun Xia | 2011-04-12 |
| 7871926 | Methods and systems for forming at least one dielectric layer | Li-Qun Xia, Mihaela Balseanu, Victor Nguyen, Derek R. Witty, Haichun Yang +3 more | 2011-01-18 |
| 7867578 | Method for depositing an amorphous carbon film with improved density and step coverage | Deenesh Padhi, Hyoung-Chan Ha, Sudha Rathi, Derek R. Witty, Chiu Chan +6 more | 2011-01-11 |