Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7951730 | Decreasing the etch rate of silicon nitride by carbon addition | Ritwik Bhatia, Li-Qun Xia, Hichem M'Saad | 2011-05-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7951730 | Decreasing the etch rate of silicon nitride by carbon addition | Ritwik Bhatia, Li-Qun Xia, Hichem M'Saad | 2011-05-31 |