Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084105 | Method of depositing boron nitride and boron nitride-derived materials | Jeong-Uk Huh, Mihaela Balseanu, Li-Qun Xia, Victor Nguyen, Hichem M'Saad | 2011-12-27 |
| 7964442 | Methods to obtain low k dielectric barrier with superior etch resistivity | Huiwen Xu, Yijun Liu, Li-Qun Xia, Hichem M'Saad | 2011-06-21 |
| 7871926 | Methods and systems for forming at least one dielectric layer | Li-Qun Xia, Mihaela Balseanu, Victor Nguyen, Hichem M'Saad, Haichun Yang +3 more | 2011-01-18 |
| 7867578 | Method for depositing an amorphous carbon film with improved density and step coverage | Deenesh Padhi, Hyoung-Chan Ha, Sudha Rathi, Chiu Chan, Sohyun Park +6 more | 2011-01-11 |