Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7925377 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Jay D. Pinson, II, Michael R. Rice +10 more | 2011-04-12 |
| 7900311 | Wafer edge cleaning | Joseph Yudovsky, Anne-Douce Coulin | 2011-03-08 |