Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8019467 | Scheduling method for processing equipment | Steve Hongkham, Eric A. Englhardt, Michael R. Rice, Chongyang Wang | 2011-09-13 |
| 7925377 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Leon Volfovski, Jay D. Pinson, II, Michael R. Rice +10 more | 2011-04-12 |