Issued Patents 2011
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8078304 | Dual-mode robot systems and methods for electronic device manufacturing | Jeffrey C. Hudgens, Todd Egan, Ingrid B. Peterson | 2011-12-13 |
| 8020689 | Break-away positioning conveyor mount for accommodating conveyor belt bends | Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliot, Jeffrey C. Hudgens | 2011-09-20 |
| 8019467 | Scheduling method for processing equipment | Steve Hongkham, Eric A. Englhardt, Helen R. Armer, Chongyang Wang | 2011-09-13 |
| 7967996 | Process for wafer backside polymer removal and wafer front side photoresist removal | Kenneth S. Collins, Hiroji Hanawa, Andrew Nguyen, Shahid Rauf, Ajit Balakrishna +6 more | 2011-06-28 |
| 7930061 | Methods and apparatus for loading and unloading substrate carriers on moving conveyors using feedback | Eric A. Englhardt, Jeffrey C. Hudgens, Kirk Van Katwyk | 2011-04-19 |
| 7927062 | Methods and apparatus for transferring substrates during electronic device manufacturing | Nicholas Cravalho, Jeffrey A. Brodine | 2011-04-19 |
| 7925377 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2011-04-12 |
| 7914248 | Methods and apparatus for repositioning support for a substrate carrier | Martin R. Elliott | 2011-03-29 |
| 7912576 | Calibration of high speed loader to substrate transport system | Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens, Kirk Van Katwyk +1 more | 2011-03-22 |