Issued Patents 2011
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8078304 | Dual-mode robot systems and methods for electronic device manufacturing | Michael R. Rice, Todd Egan, Ingrid B. Peterson | 2011-12-13 |
| 8074597 | Methods and apparatus for purging a substrate carrier | Vinay Shah, Eric A. Englhardt, Martin R. Elliott | 2011-12-13 |
| 8066466 | Substrate processing sequence in a Cartesian robot cluster tool | Mike Rice, Charles T. Carlson, William T. Weaver, Robert B. Lowrance, Eric A. Englhardt +6 more | 2011-11-29 |
| 8020689 | Break-away positioning conveyor mount for accommodating conveyor belt bends | Michael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliot | 2011-09-20 |
| 8016542 | Methods and apparatus for extending the reach of a dual scara robot linkage | Damon K. Cox, Marvin L. Freeman, Jason M. Schaller, Jeffrey A. Brodine | 2011-09-13 |
| 7984543 | Methods for moving a substrate carrier | Martin R. Elliott, Vinay Shah, Eric A. Englhardt | 2011-07-26 |
| 7930061 | Methods and apparatus for loading and unloading substrate carriers on moving conveyors using feedback | Michael R. Rice, Eric A. Englhardt, Kirk Van Katwyk | 2011-04-19 |
| 7925377 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2011-04-12 |
| 7912576 | Calibration of high speed loader to substrate transport system | Michael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott, Kirk Van Katwyk +1 more | 2011-03-22 |