Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8066466 | Substrate processing sequence in a Cartesian robot cluster tool | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Eric A. Englhardt +6 more | 2011-11-29 |
| 8020689 | Break-away positioning conveyor mount for accommodating conveyor belt bends | Michael R. Rice, Eric A. Englhardt, Martin R. Elliot, Jeffrey C. Hudgens | 2011-09-20 |
| 7925377 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2011-04-12 |
| 7912576 | Calibration of high speed loader to substrate transport system | Michael R. Rice, Eric A. Englhardt, Martin R. Elliott, Jeffrey C. Hudgens, Kirk Van Katwyk +1 more | 2011-03-22 |