Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8066466 | Substrate processing sequence in a Cartesian robot cluster tool | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more | 2011-11-29 |
| 7930061 | Methods and apparatus for loading and unloading substrate carriers on moving conveyors using feedback | Michael R. Rice, Eric A. Englhardt, Jeffrey C. Hudgens | 2011-04-19 |
| 7912576 | Calibration of high speed loader to substrate transport system | Michael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens +1 more | 2011-03-22 |