Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8074597 | Methods and apparatus for purging a substrate carrier | Vinay Shah, Eric A. Englhardt, Jeffrey C. Hudgens | 2011-12-13 |
| 7984543 | Methods for moving a substrate carrier | Vinay Shah, Eric A. Englhardt, Jeffrey C. Hudgens | 2011-07-26 |
| 7914248 | Methods and apparatus for repositioning support for a substrate carrier | Michael R. Rice | 2011-03-29 |
| 7912576 | Calibration of high speed loader to substrate transport system | Michael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Jeffrey C. Hudgens, Kirk Van Katwyk +1 more | 2011-03-22 |