Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8074597 | Methods and apparatus for purging a substrate carrier | Eric A. Englhardt, Jeffrey C. Hudgens, Martin R. Elliott | 2011-12-13 |
| 8066466 | Substrate processing sequence in a Cartesian robot cluster tool | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more | 2011-11-29 |
| 7984543 | Methods for moving a substrate carrier | Martin R. Elliott, Eric A. Englhardt, Jeffrey C. Hudgens | 2011-07-26 |
| 7951637 | Back contact solar cells using printed dielectric barrier | Timothy Weidman, Rohit Mishra, Michael P. Stewart, Kapila Wijekoon, Yonghwa Chris Cha +1 more | 2011-05-31 |
| 7894923 | Methods and apparatus for sensing substrates in carriers | Sushant S. Koshti, Eric A. Englhardt | 2011-02-22 |