Issued Patents 2011
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8074597 | Methods and apparatus for purging a substrate carrier | Vinay Shah, Jeffrey C. Hudgens, Martin R. Elliott | 2011-12-13 |
| 8066466 | Substrate processing sequence in a Cartesian robot cluster tool | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more | 2011-11-29 |
| 8020689 | Break-away positioning conveyor mount for accommodating conveyor belt bends | Michael R. Rice, Robert B. Lowrance, Martin R. Elliot, Jeffrey C. Hudgens | 2011-09-20 |
| 8019467 | Scheduling method for processing equipment | Steve Hongkham, Michael R. Rice, Helen R. Armer, Chongyang Wang | 2011-09-13 |
| 7984543 | Methods for moving a substrate carrier | Martin R. Elliott, Vinay Shah, Jeffrey C. Hudgens | 2011-07-26 |
| 7930061 | Methods and apparatus for loading and unloading substrate carriers on moving conveyors using feedback | Michael R. Rice, Jeffrey C. Hudgens, Kirk Van Katwyk | 2011-04-19 |
| 7912576 | Calibration of high speed loader to substrate transport system | Michael R. Rice, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens, Kirk Van Katwyk +1 more | 2011-03-22 |
| 7894923 | Methods and apparatus for sensing substrates in carriers | Sushant S. Koshti, Vinay Shah | 2011-02-22 |