Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8078304 | Dual-mode robot systems and methods for electronic device manufacturing | Michael R. Rice, Jeffrey C. Hudgens, Ingrid B. Peterson | 2011-12-13 |
| 7969568 | Spectrographic metrology of patterned wafers | James M. Holden, Edgar Genio | 2011-06-28 |