Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8027031 | Spectrometric metrology of workpieces using a permanent window as a spectral reference | Edward W. Budiarto | 2011-09-27 |
| 8018586 | Metrology of thin film devices using an addressable micromirror array | Edward W. Budiarto | 2011-09-13 |
| 7969568 | Spectrographic metrology of patterned wafers | James M. Holden, Todd Egan | 2011-06-28 |
| 7911603 | Spectrometric metrology of workpieces using a permanent window as a spectral reference | Edward W. Budiarto | 2011-03-22 |