Issued Patents 2011
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8080479 | Plasma process uniformity across a wafer by controlling a variable frequency coupled to a harmonic resonator | Kenneth S. Collins, Hiroji Hanawa, Kartik Ramaswamy, Douglas A. Buchberger, Jr., Kallol Bera +10 more | 2011-12-20 |
| 8075728 | Gas flow equalizer plate suitable for use in a substrate process chamber | Ajit Balakrishna, Andrew Nguyen, Michael D. Willwerth, Valentin N. Todorow | 2011-12-13 |
| 8076247 | Plasma process uniformity across a wafer by controlling RF phase between opposing electrodes | Kenneth S. Collins, Hiroji Hanawa, Kartik Ramaswamy, Douglas A. Buchberger, Jr., Kallol Bera +10 more | 2011-12-13 |
| 7988815 | Plasma reactor with reduced electrical skew using electrical bypass elements | Kenneth S. Collins, Kallol Bera, Kartik Ramaswamy, Hiroji Hanawa, Andrew Nguyen +5 more | 2011-08-02 |
| 7968469 | Method of processing a workpiece in a plasma reactor with variable height ground return path to control plasma ion density uniformity | Kenneth S. Collins, Hiroji Hanawa, Kartik Ramaswamy, Douglas A. Buchberger, Jr., Kallol Bera +10 more | 2011-06-28 |
| 7967996 | Process for wafer backside polymer removal and wafer front side photoresist removal | Kenneth S. Collins, Hiroji Hanawa, Andrew Nguyen, Ajit Balakrishna, Valentin N. Todorow +6 more | 2011-06-28 |
| 7884025 | Plasma process uniformity across a wafer by apportioning ground return path impedances among plural VHF sources | Kenneth S. Collins, Hiroji Hanawa, Kartik Ramaswamy, Douglas A. Buchberger, Jr., Kallol Bera +10 more | 2011-02-08 |
| 7879183 | Apparatus and method for front side protection during backside cleaning | Imad Yousif, Ying Rui, Nancy Fung, Martin Jeffrey Salinas, Ajit Balakrishna +2 more | 2011-02-01 |
| 7879731 | Improving plasma process uniformity across a wafer by apportioning power among plural VHF sources | Kenneth S. Collins, Hiroji Hanawa, Kartik Ramaswamy, Douglas A. Buchberger, Jr., Kallol Bera +10 more | 2011-02-01 |