Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8075728 | Gas flow equalizer plate suitable for use in a substrate process chamber | Shahid Rauf, Andrew Nguyen, Michael D. Willwerth, Valentin N. Todorow | 2011-12-13 |
| 7987814 | Lower liner with integrated flow equalizer and improved conductance | James D. Carducci, Andrew Nguyen, Michael Kutney | 2011-08-02 |
| 7967996 | Process for wafer backside polymer removal and wafer front side photoresist removal | Kenneth S. Collins, Hiroji Hanawa, Andrew Nguyen, Shahid Rauf, Valentin N. Todorow +6 more | 2011-06-28 |
| 7879183 | Apparatus and method for front side protection during backside cleaning | Imad Yousif, Ying Rui, Nancy Fung, Martin Jeffrey Salinas, Anchel Sheyner +2 more | 2011-02-01 |