Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048806 | Methods to avoid unstable plasma states during a process transition | Daniel J. Hoffman, Gerardo Delgadino, Ezra Robert Gold, Ashok Sinha, Xiaoye Zhao +2 more | 2011-11-01 |
| 7987814 | Lower liner with integrated flow equalizer and improved conductance | James D. Carducci, Andrew Nguyen, Ajit Balakrishna | 2011-08-02 |