Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083963 | Removal of process residues on the backside of a substrate | Indrajit Lahiri, Teh-Tien Su, Sy-Yuan Brian Shieh, Ashok Sinha | 2011-12-27 |
| 8048806 | Methods to avoid unstable plasma states during a process transition | Michael Kutney, Daniel J. Hoffman, Ezra Robert Gold, Ashok Sinha, Xiaoye Zhao +2 more | 2011-11-01 |
| 7977245 | Methods for etching a dielectric barrier layer with high selectivity | Ying Xiao, Karsten Schneider | 2011-07-12 |