Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7977245 | Methods for etching a dielectric barrier layer with high selectivity | Gerardo Delgadino, Karsten Schneider | 2011-07-12 |
| 7919335 | Formation of shallow trench isolation using chemical vapor etch | Chyi Shyuan Chern | 2011-04-05 |