Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7967996 | Process for wafer backside polymer removal and wafer front side photoresist removal | Kenneth S. Collins, Hiroji Hanawa, Andrew Nguyen, Shahid Rauf, Ajit Balakrishna +6 more | 2011-06-28 |
| 7879183 | Apparatus and method for front side protection during backside cleaning | Ying Rui, Nancy Fung, Martin Jeffrey Salinas, Ajit Balakrishna, Anchel Sheyner +2 more | 2011-02-01 |