Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7921803 | Chamber components with increased pyrometry visibility | Joseph Yudovsky, Ravi Jallepally, Yi-Chiau Huang, Maitreyee Mahajani, Kevin Griffin +1 more | 2011-04-12 |
| 7897208 | Low temperature ALD SiO2 | Maitreyee Mahajani, Yi-Chiau Huang | 2011-03-01 |