Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043667 | Method to improve mechanical strength of low-K dielectric film using modulated UV exposure | Ananda K. Bandyopadhyay, Seon-Mee Cho, Haiying Fu, David Mordo | 2011-10-25 |
| 7906174 | PECVD methods for producing ultra low-k dielectric films using UV treatment | Qingguo Wu, Dan Vitkavage | 2011-03-15 |