Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7927986 | Ion implantation with heavy halogenide compounds | Ludovic Godet, Edwin Arevalo | 2011-04-19 |
| 7892985 | Method for porogen removal and mechanical strength enhancement of low-k carbon doped silicon oxide using low thermal budget microwave curing | Seon-Mee Cho, Mike Barnes | 2011-02-22 |
| 7863190 | Method of selective coverage of high aspect ratio structures with a conformal film | Mihai Buretea, Collin Kwok Leung Mui | 2011-01-04 |
| 7863194 | Implantation of multiple species to address copper reliability | Heyun Yin, Vikram Singh | 2011-01-04 |