Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8003498 | Particle beam assisted modification of thin film materials | Jonathan Gerald England, Frank Sinclair, John (Bon-Woong) Koo, Rajesh Dorai | 2011-08-23 |
| 7927986 | Ion implantation with heavy halogenide compounds | George D. Papasouliotis, Edwin Arevalo | 2011-04-19 |
| 7878145 | Monitoring plasma ion implantation systems for fault detection and process control | Ziwei Fang, Sung-Cheon Ko, Edmund J. Winder, Daniel Distaso, Bon-Woong Koo +1 more | 2011-02-01 |