Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8072149 | Unbalanced ion source | Jeong-Ha Cho, Byung-Yeal Yoon, Yong Tae Kim, Jeong Ho Yoon | 2011-12-06 |
| 7888636 | Measuring energy contamination using time-of-flight techniques | Jonathan Gerald England | 2011-02-15 |
| 7888662 | Ion source cleaning method and apparatus | Costel Biloiu, Craig R. Chaney, Eric R. Cobb, Wilhelm P. Platow | 2011-02-15 |
| 7878145 | Monitoring plasma ion implantation systems for fault detection and process control | Ziwei Fang, Sung-Cheon Ko, Edmund J. Winder, Daniel Distaso, Ludovic Godet +1 more | 2011-02-01 |