Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8071956 | Cleaning of an extraction aperture of an ion source | Alexander S. Perel, Leo V. Klos | 2011-12-06 |
| 8003957 | Ethane implantation with a dilution gas | Adolph R. Dori, Christopher R. Hatem, Alexander S. Perel | 2011-08-23 |
| 8003959 | Ion source cleaning end point detection | Wilhelm P. Platow, Neil J. Bassom, Peter F. Kurunczi, Alexander S. Perel | 2011-08-23 |
| 7888662 | Ion source cleaning method and apparatus | Costel Biloiu, Eric R. Cobb, Bon-Woong Koo, Wilhelm P. Platow | 2011-02-15 |