Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8003956 | Method and apparatus for controlling beam current uniformity in an ion implanter | D. Jeffrey Lischer, John (Bon-Woong) Koo, Shardul S. Patel, Wilhelm P. Platow | 2011-08-23 |
| 8003959 | Ion source cleaning end point detection | Wilhelm P. Platow, Neil J. Bassom, Alexander S. Perel, Craig R. Chaney | 2011-08-23 |