Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8003956 | Method and apparatus for controlling beam current uniformity in an ion implanter | D. Jeffrey Lischer, John (Bon-Woong) Koo, Peter F. Kurunczi, Wilhelm P. Platow | 2011-08-23 |