Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8003956 | Method and apparatus for controlling beam current uniformity in an ion implanter | D. Jeffrey Lischer, John (Bon-Woong) Koo, Peter F. Kurunczi, Shardul S. Patel | 2011-08-23 |
| 8003959 | Ion source cleaning end point detection | Neil J. Bassom, Peter F. Kurunczi, Alexander S. Perel, Craig R. Chaney | 2011-08-23 |
| 7888662 | Ion source cleaning method and apparatus | Costel Biloiu, Craig R. Chaney, Eric R. Cobb, Bon-Woong Koo | 2011-02-15 |