Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8049192 | Apparatus and system for controlling ion ribbon beam uniformity in an ion implanter | Leo V. Klos, Joseph C. Olson | 2011-11-01 |
| 8022371 | Cathode having electron production and focusing grooves, ion source and related method | — | 2011-09-20 |
| 8003959 | Ion source cleaning end point detection | Wilhelm P. Platow, Peter F. Kurunczi, Alexander S. Perel, Craig R. Chaney | 2011-08-23 |