Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8049192 | Apparatus and system for controlling ion ribbon beam uniformity in an ion implanter | Neil J. Bassom, Leo V. Klos | 2011-11-01 |
| 7868305 | Technique for ion beam angle spread control | Atul Gupta | 2011-01-11 |
| 7863531 | Techniques for making high voltage connections | Douglas E. May, Kasegn D. Tekletsadik, Eric D. Hermanson, Piotr Lubicki, Russell J. Low +1 more | 2011-01-04 |