Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8071956 | Cleaning of an extraction aperture of an ion source | Craig R. Chaney, Alexander S. Perel | 2011-12-06 |
| 8049192 | Apparatus and system for controlling ion ribbon beam uniformity in an ion implanter | Neil J. Bassom, Joseph C. Olson | 2011-11-01 |