Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8071956 | Cleaning of an extraction aperture of an ion source | Craig R. Chaney, Leo V. Klos | 2011-12-06 |
| 8003957 | Ethane implantation with a dilution gas | Craig R. Chaney, Adolph R. Dori, Christopher R. Hatem | 2011-08-23 |
| 8003959 | Ion source cleaning end point detection | Wilhelm P. Platow, Neil J. Bassom, Peter F. Kurunczi, Craig R. Chaney | 2011-08-23 |
| 7999479 | Conjugated ICP and ECR plasma sources for wide ribbon ion beam generation and control | Costel Biloiu, Jay T. Scheuer | 2011-08-16 |