Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7999479 | Conjugated ICP and ECR plasma sources for wide ribbon ion beam generation and control | Jay T. Scheuer, Alexander S. Perel | 2011-08-16 |
| 7888662 | Ion source cleaning method and apparatus | Craig R. Chaney, Eric R. Cobb, Bon-Woong Koo, Wilhelm P. Platow | 2011-02-15 |