Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7887034 | Indirectly heated cathode clamp system and method | Stephen E. Krause, Russell J. Low | 2011-02-15 |
| 7888662 | Ion source cleaning method and apparatus | Costel Biloiu, Craig R. Chaney, Bon-Woong Koo, Wilhelm P. Platow | 2011-02-15 |