Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7999479 | Conjugated ICP and ECR plasma sources for wide ribbon ion beam generation and control | Costel Biloiu, Alexander S. Perel | 2011-08-16 |
| 7878145 | Monitoring plasma ion implantation systems for fault detection and process control | Ziwei Fang, Sung-Cheon Ko, Edmund J. Winder, Daniel Distaso, Ludovic Godet +1 more | 2011-02-01 |