Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7981777 | Methods of depositing stable and hermetic ashable hardmask films | Pramod Subramonium, Yongsik Yu, Jon Henri | 2011-07-19 |
| 7981810 | Methods of depositing highly selective transparent ashable hardmask films | Pramod Subramonium, Jon Henri | 2011-07-19 |
| 7915166 | Diffusion barrier and etch stop films | Yongsik Yu, Pramod Subramonium, Jon Henri, Elizabeth Apen, Dan Vitkavage | 2011-03-29 |