Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8034725 | Method of eliminating small bin defects in high throughput TEOS films | Xingyuan Tang, Jason Tian, Kevin Gerber, Arul N. Dhas | 2011-10-11 |
| 7981777 | Methods of depositing stable and hermetic ashable hardmask films | Pramod Subramonium, Yongsik Yu, Zhiyuan Fang | 2011-07-19 |
| 7981810 | Methods of depositing highly selective transparent ashable hardmask films | Pramod Subramonium, Zhiyuan Fang | 2011-07-19 |
| 7955990 | Method for improved thickness repeatability of PECVD deposited carbon films | Gishun Hsu, Robert Sculac, Scott Stoddard | 2011-06-07 |
| 7923376 | Method of reducing defects in PECVD TEOS films | N. Arul Dhas | 2011-04-12 |
| 7915166 | Diffusion barrier and etch stop films | Yongsik Yu, Pramod Subramonium, Zhiyuan Fang, Elizabeth Apen, Dan Vitkavage | 2011-03-29 |
| 7906817 | High compressive stress carbon liners for MOS devices | Qingguo Wu, James S. Sims, Mandyam Sriram, Seshasayee Varadarajan, Haiying Fu +2 more | 2011-03-15 |