Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7955990 | Method for improved thickness repeatability of PECVD deposited carbon films | Jon Henri, Gishun Hsu, Robert Sculac | 2011-06-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7955990 | Method for improved thickness repeatability of PECVD deposited carbon films | Jon Henri, Gishun Hsu, Robert Sculac | 2011-06-07 |