Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8058179 | Atomic layer removal process with higher etch amount | Nerissa Draeger, Henner Meinhold, Bart J. van Schravendijk, Lakshmi Nittala | 2011-11-15 |
| 7981763 | Atomic layer removal for high aspect ratio gapfill | Bart J. van Schravendijk | 2011-07-19 |