Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8049872 | Endpoint detection device for realizing real-time control of plasma reactor, plasma reactor with endpoint detection device, and endpoint detection method | Kun Joo Park, Kwang Hoon Han, Kee Hyun Kim, Weon Mook Lee, Kyounghoon Han | 2011-11-01 |
| 7955986 | Capacitively coupled plasma reactor with magnetic plasma control | Daniel J. Hoffman, Matthew L. Miller, Jang-Gyoo Yang, Michael Barnes, Tetsuya Ishikawa +1 more | 2011-06-07 |