Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8049872 | Endpoint detection device for realizing real-time control of plasma reactor, plasma reactor with endpoint detection device, and endpoint detection method | Kun Joo Park, Kee Hyun Kim, Weon Mook Lee, Kyounghoon Han, Heeyeop Chae | 2011-11-01 |