Issued Patents 2011
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043933 | Integration sequences with top surface profile modification | Xinliang Lu, Zhenbin Ge, Mei Chang, Hoiman Raymond Hung, Nitin K. Ingle | 2011-10-25 |
| 7994002 | Method and apparatus for trench and via profile modification | Mei Chang, Xinliang Lu, Zhenbin Ge | 2011-08-09 |
| 7977246 | Thermal annealing method for preventing defects in doped silicon oxide surfaces during exposure to atmosphere | Haichun Yang, Xinliang Lu, Mei Chang | 2011-07-12 |
| 7955510 | Oxide etch with NH4-NF3 chemistry | Reza Arghavani, Xinliang Lu | 2011-06-07 |
| 7939422 | Methods of thin film process | Nitin K. Ingle, Jing Tang, Yi Zheng, Zheng Yuan, Zhenbin Ge +4 more | 2011-05-10 |
| 7910853 | Direct real-time monitoring and feedback control of RF plasma output for wafer processing | David T. Or, Yu-Tzu Chang, William Kuang, Joel M. Huston, Mei Chang | 2011-03-22 |
| 7871926 | Methods and systems for forming at least one dielectric layer | Li-Qun Xia, Mihaela Balseanu, Victor Nguyen, Derek R. Witty, Hichem M'Saad +3 more | 2011-01-18 |
| 7867789 | Contact clean by remote plasma and repair of silicide surface | Xinliang Lu, Chiukin Lai, Mei Chang | 2011-01-11 |