Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7910853 | Direct real-time monitoring and feedback control of RF plasma output for wafer processing | Yu-Tzu Chang, William Kuang, Joel M. Huston, Chien-Teh Kao, Mei Chang | 2011-03-22 |
| 7871470 | Substrate support lift mechanism | Eric W. Schieve, Keith Kuang-Kuo Koai, Rene T. Correa | 2011-01-18 |