Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8003067 | Apparatus and methods for ambient air abatement of electronic manufacturing effluent | Mark W. Curry, Barry Page, Shaun W. Crawford, Robbert M. Vermeulen, William D. Pyzel +3 more | 2011-08-23 |
| 7871470 | Substrate support lift mechanism | Eric W. Schieve, Keith Kuang-Kuo Koai, David T. Or | 2011-01-18 |