Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8003067 | Apparatus and methods for ambient air abatement of electronic manufacturing effluent | Barry Page, Shaun W. Crawford, Robbert M. Vermeulen, William D. Pyzel, Youssef A. Loldj +3 more | 2011-08-23 |
| 7970483 | Methods and apparatus for improving operation of an electronic device manufacturing system | Sebastien Raoux, Peter I. Porshnev, Allen Fox | 2011-06-28 |